Tomo-Lithographic-Molding (TLMTM) - A Breakthrough Manufacturing Process for Large Area Micro-Mechanical Systems

نویسندگان

  • Michael Appleby
  • James E. Atkinson
  • William Randolph
چکیده

Mikro Systems Inc. (MSI) has developed a high volume manufacturing process for producing complex, netshape, micro-to-meso scale structures from advanced materials comprised of powdered metals, ceramics, and polymers. This process, called Tomo-Lithographic-Molding (TLMTM), hinges upon a high-resolution master tool composed from lithographically micro-machined layers, precisely aligned and stack laminated into a monolithic solid. By combining dissimilarly patterned layers or “toma”, 3D cavities of otherwise unattainable sophistication and precision can be created. Combining these disciplines with proprietary casting and forming methods enables the production of cost effective, high aspect-ratio devices and systems with features in the micro-to-meso scale. Thousands of micro-meso features in varied distributions and customized geometries can be arrayed upon large (square meter) planar or non-planar surfaces. These surfaces may, in turn, be used as plies in a macro-scale, laminate composite structure thus optimizing physical properties.

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تاریخ انتشار 2005